Chamber Size: 500×500×500 mm
Vacuum Degree: 6.67×10⁻³ Pa
Pressure Rise Rate: ≤0.66 Pa/h (cold empty furnace, measured over 24 hours)
Pumping Speed: ≤120 min (at room temperature, empty furnace, starting timing when main valve opens at 1×10⁻³ Pa)
Max. Design Temperature: 1200℃
Long-term Operating Temperature: 1150℃
Heating Rate: ≤10℃/min (non-linear)
Temperature Uniformity: ≤±5℃ (tested at 1200℃ with empty furnace, nine points)
Temperature Control Accuracy: ±1℃
Usable Atmospheres: Nitrogen, argon, carbon monoxide, oxygen, hydrogen, etc.
Oxygen Analyzer: Real-time monitoring of residual oxygen level inside the furnace to ensure a stable low-oxygen environment, preventing material oxidation and performance degradation